Real Time Endpoint Detection in Plasma Etching Using Decision Making Algorithm
نویسندگان
چکیده
منابع مشابه
Multivariate Endpoint Detection of Plasma Etching Processes
In plasma etching processes it is critical to know when the film being etched has cleared to the underlying film, i.e. to detect endpoint, in order to achieve the desired device performance in the resulting integrated circuit. The most highly utilized sensor technology for determining endpoint has historically been optical emission spectroscopy (OES), because it is both non-invasive and highly ...
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ژورنال
عنوان ژورنال: Journal of IKEEE
سال: 2016
ISSN: 1226-7244
DOI: 10.7471/ikeee.2016.20.1.009